Deposition and Microfabrication

Physical structures ranging in size from miniature objects (nanomaterials) to electrical devices (thin films) with planned properties can be made using the deposition and microfabrication capability. Materials with specific surface, bulk and interfacial properties for energy and environmental applications can be designed and made using these integrated capabilities. See a complete list of Deposition and Microfabrication instruments.

Resources and Techniques

  • Functionalized surfaces – Design and manufacture surfaces optimized for specific functions related to catalysis and other areas.
  • Model systems for geochemistry/biogeochemistry – Grow model oxide and mineral films with varying structure and complexity.
  • Materials with designed properties – Film growth and ion implantation for materials with specific properties.
  • Chemical and biological sensing – Film and surface layer deposition and modification, micro and nano-lithography, and solution synthesis capabilities.
  • Microfabrication – Engineering, software development and fabrication are used to design and fabricate next-generation components.

Description

Capability Details
• Unique oxygen-plasma-assisted molecular beam epitaxy system for designing and constructing high-quality oxide thin films
• Spin coating and wet chemical synthesis to prepare thin films and nanostructures
• Focused ion beam for nanolithography and deposition and manipulation of structures at the nano scale
• Microfabrication suite for designing and etching complex patterns into varied substrates
• Hybrid physical vapor deposition system for depositing thin films of metals, oxides, nitrides and alloys with high purity and thickness control
• Pulsed laser deposition for growing complex oxides films
• Low-energy ion deposition for preparing ultra-pure films of complex molecules, including biomolecules, through a mass-selected soft-landing process
• Diverse and unrivaled expertise in advanced signal acquisition and processing instrumentation, signal analysis algorithms, laboratory automation systems and scientific data management solutions

Instruments

This instrument is newly available to EMSL users. For more information about this instrument and the science it will help enable, see the ...
Custodian(s): Ryan Kelly, Hardeep S Mehta
The FEI Helios Nanolab dual-beam focused ion beam/scanning electron microscopy (FIB/SEM) microscope combines two important high-resolution...
Custodian(s): Bruce Arey
Only available at EMSL, the Discovery Deposition System has been customized to be a fully automated multi-functional "hybrid" instrument with...
PNNL’s custom-built ice nucleation chamber is available to EMSL users to study the ice nucleating properties of atmospheric particles or...
The mass-selected ion deposition system is a new instrument constructed at EMSL. The apparatus, shown in Figure 1, includes a high-transmission...
Custodian(s): Julia Laskin

Publications

Images of La-exchanged NaY zeolite obtained with aberration-corrected scanning transmission electron microscopy (STEM) show that about 80% of the La...
Experimental and theoretical investigations were performed to investigate the effect of water on optical properties of nanoceria as a function of Ce3...
For the first time, the use of an argon cluster ion sputtering source has been demonstrated to perform superiorly relative to traditional oxygen and...
Lithium alloys of group IV elements such as silicon and germanium are attractive candidates for use as anodes in high-energy-density lithium-ion...
This study focused on determining the presence of organic phases in the siliceous components of rigid marine composites ("glass"...

Science Highlights

Posted: April 20, 2016
Molybdenum trioxide, or α-MoO3, has potential for use in lithium ion batteries and electrochromic devices, such as smart windows. A team of...
Posted: March 03, 2016
An international team of scientists demonstrated a new material by combining two oxide materials on the atomic scale that could store sunlight as...
Posted: February 01, 2016
The Science Microbial strains engineered to produce a large amount of lipids hold tremendous promise for the production of biofuels and chemicals. A...
Posted: December 28, 2015
Scientists are searching for plentiful materials that allow solar panels to produce fuel. Storing solar energy as fuel could allow solar power to...
Posted: August 17, 2015
The performance of solar cells, flat panel displays and other electronics are limited by today's materials. Scientists at Pacific Northwest National...

Instruments

Remediation of metal and radionuclide contaminants in soil and groundwater systems is challenging because of their strong chemical interactions with...
We will develop new high-temperature sensor materials with adequate radiation damage resistance to acquire local diagnostic data in extreme...
The aim of this research is to create oxygen sensing fluorescent surfaces in plastic, and microfluidic structures, that are useful in the...
Synthesis of radioactive components of nuclear weapons generated abundant contaminant components, which were purposefully or accidentally...
EMSL resources are requested to enable an international team of collaborators to solve fundamental problems in interfacial glass corrosion chemistry...

Physical structures ranging in size from miniature objects (nanomaterials) to electrical devices (thin films) with planned properties can be made using the deposition and microfabrication capability. Materials with specific surface, bulk and interfacial properties for energy and environmental applications can be designed and made using these integrated capabilities. See a complete list of Deposition and Microfabrication instruments.

Resources and Techniques

  • Functionalized surfaces – Design and manufacture surfaces optimized for specific functions related to catalysis and other areas.
  • Model systems for geochemistry/biogeochemistry – Grow model oxide and mineral films with varying structure and complexity.
  • Materials with designed properties – Film growth and ion implantation for materials with specific properties.
  • Chemical and biological sensing – Film and surface layer deposition and modification, micro and nano-lithography, and solution synthesis capabilities.
  • Microfabrication – Engineering, software development and fabrication are used to design and fabricate next-generation components.

Pages

Leads

(509) 371-7816

Dr. Bowden joined EMSL in 2009 and currently manages EMSL's optical spectroscopy and diffraction, subsurface flow and transport, and microfabrication and deposition capabilities. He is responsible for the X-ray diffraction facility and assists...