Office of Science

Deposition and Microfabrication

Designed to augment research important to a variety of disciplines, EMSL's Deposition and Microfabrication Capability tackles serious scientific challenges from a microscopic perspective. From deposition instruments that emphasize oxide films and interfaces to a state-of-the-art microfabrication suite, EMSL has equipment to tailor surfaces, as diverse as single-crystal thin films or nanostructures, or create the microenvironments needed for direct experimentation at micron scales.

Users benefit from coupling deposition and microfabrication applications with EMSL's other mass spectrometry, microscopy, spectroscopy, and diffraction capabilities. Ultimately, this integrated approach supports novel research in EMSL's primary Science Themes—Biological Interactions and Dynamics, Geochemistry/Biogeochemistry and Subsurface Science, and Science of Interfacial Phenomena.

Capability Detail

Photo of deposition and microfabrication researchers

Refer to the table (Deposition and Microfabrication Capabilities Available at EMSL) for a list and information regarding available instrumentation. In brief, these instruments offer EMSL users the following capabilities:



EMSL's microfabrication instruments are housed within an existing Class 1000 (ISO 14644-1 Class 6) certified clean room that circulates prefiltered air to minimize any airborne contamination.

  1. Syngas Conversion to Gasoline-Range Hydrocarbons over Pd/ZnO/Al2O3 and ZSM-5 Composite Catalyst System.
  2. Elucidating graphene - Ionic Liquid interfacial region: a combined experimental and computational study.
  3. In situ SEM and ToF-SIMS analysis of IgG conjugated gold nanoparticles at aqueous surfaces.
  4. Energetics of Defects on Graphene through Fluorination.
  5. Assigning Oxidation States to Organic Compounds via Predictions from X-ray Photoelectron Spectroscopy: A Discussion of Approaches and Recommended Improvements.
  1. Targeted strategies improve efficacy of enzymes to convert biomass to biofuels (Enzyme evaluation)
  2. Iron-bearing minerals in sediments naturally reduce contaminant levels (Lack of iron)
  3. Predictive models of environmental reaction kinetics made more accurate, scalable (Scaled up)
  4. Sulfide and iron work together to reveal a new path for radionuclide sequestration (Sulfur cleans up)
  5. Scientists gain first quantitative insights into electron transfer from minerals to microbes (Tunable transfer)

Deposition and Microfabrication Capabilities Available at EMSL

Instrument Contact
Deposition: Hybrid Thin Film Deposition System Bowden, Mark
Kelly, Ryan
Mehta, Hardeep S
Deposition: Molecular Beam Epitaxy #1 Chambers, Scott
Droubay, Timothy C
Kaspar, Tiffany C
Deposition: Oxygen Assisted Molecular Beam Epitaxy Chambers, Scott
Droubay, Timothy C
Du, Yingge
Kaspar, Tiffany C
Deposition: Pulsed Laser Deposition System Chambers, Scott
Droubay, Timothy C
Kaspar, Tiffany C
Electron Microscope: Dual FIB/SEM (FEI Helios) Arey, Bruce
Mass-Selected Ion Deposition System - Electrospray Source Laskin, Julia
Microfabrication Laboratory (Clean Room) Kelly, Ryan
Microfabrication: Deep Reactive Ion Etching System Kelly, Ryan
Mehta, Hardeep S
Microfabrication: Mask Aligner Kelly, Ryan
Mehta, Hardeep S
Microfabrication: Nanoimprinter Kelly, Ryan
Physical Property Management System (PPMS)
Deposition and Microfabrication Capability Lead: Mark Bowden | , 509-371-7816