Deposition and Microfabrication

Physical structures ranging in size from miniature objects (nanomaterials) to electrical devices (thin films) with planned properties can be made using the deposition and microfabrication capability. Materials with specific surface, bulk and interfacial properties for energy and environmental applications can be designed and made using these integrated capabilities. See a complete list of Deposition and Microfabrication instruments.

Resources and Techniques

  • Functionalized surfaces – Design and manufacture surfaces optimized for specific functions related to catalysis and other areas.
  • Model systems for geochemistry/biogeochemistry – Grow model oxide and mineral films with varying structure and complexity.
  • Materials with designed properties – Film growth and ion implantation for materials with specific properties.
  • Chemical and biological sensing – Film and surface layer deposition and modification, micro and nano-lithography, and solution synthesis capabilities.
  • Microfabrication – Engineering, software development and fabrication are used to design and fabricate next-generation components.

Description

Capability Details
• Unique oxygen-plasma-assisted molecular beam epitaxy system for designing and constructing high-quality oxide thin films
• Spin coating and wet chemical synthesis to prepare thin films and nanostructures
• Focused ion beam for nanolithography and deposition and manipulation of structures at the nano scale
• Microfabrication suite for designing and etching complex patterns into varied substrates
• Hybrid physical vapor deposition system for depositing thin films of metals, oxides, nitrides and alloys with high purity and thickness control
• Pulsed laser deposition for growing complex oxides films
• Low-energy ion deposition for preparing ultra-pure films of complex molecules, including biomolecules, through a mass-selected soft-landing process
• Diverse and unrivaled expertise in advanced signal acquisition and processing instrumentation, signal analysis algorithms, laboratory automation systems and scientific data management solutions

Instruments

This instrument is newly available to EMSL users. For more information about this instrument and the science it will help enable, see the ...
Custodian(s): Ryan Kelly, Hardeep S Mehta
The FEI Helios Nanolab dual-beam focused ion beam/scanning electron microscopy (FIB/SEM) microscope combines two important high-resolution...
Custodian(s): Bruce Arey
Only available at EMSL, the Discovery Deposition System has been customized to be a fully automated multi-functional "hybrid" instrument with...
PNNL’s custom-built ice nucleation chamber is available to EMSL users to study the ice nucleating properties of atmospheric particles or...
The mass-selected ion deposition system is a new instrument constructed at EMSL. The apparatus, shown in Figure 1, includes a high-transmission...
Custodian(s): Julia Laskin

Publications

For applications of tristructural isotropic (TRISO) fuel particles in high temperature reactors, release of radioactive Ag isotope (110mAg) through...
Experimental verification of the microscopic origin of resistance switching in metal/oxide/metal heterostructures is needed for applications in non-...
Materials exposed to radiation show structural changes and damages, especially in the nanoscale range. The characterizing equipment involving...
The distribution and concentration of lithium in Li-ion battery cathodes at different stages of cycling is a pivotal factor in determining battery...
Hysteretic behavior was studied in a series of Fe thin films, grown by molecular beam epitaxy, having different grain sizes and grown on different...

Science Highlights

Posted: April 20, 2016
Molybdenum trioxide, or α-MoO3, has potential for use in lithium ion batteries and electrochromic devices, such as smart windows. A team of...
Posted: March 03, 2016
An international team of scientists demonstrated a new material by combining two oxide materials on the atomic scale that could store sunlight as...
Posted: February 01, 2016
The Science Microbial strains engineered to produce a large amount of lipids hold tremendous promise for the production of biofuels and chemicals. A...
Posted: December 28, 2015
Scientists are searching for plentiful materials that allow solar panels to produce fuel. Storing solar energy as fuel could allow solar power to...
Posted: August 17, 2015
The performance of solar cells, flat panel displays and other electronics are limited by today's materials. Scientists at Pacific Northwest National...

Instruments

Remediation of metal and radionuclide contaminants in soil and groundwater systems is challenging because of their strong chemical interactions with...
We will develop new high-temperature sensor materials with adequate radiation damage resistance to acquire local diagnostic data in extreme...
The aim of this research is to create oxygen sensing fluorescent surfaces in plastic, and microfluidic structures, that are useful in the...
Synthesis of radioactive components of nuclear weapons generated abundant contaminant components, which were purposefully or accidentally...
EMSL resources are requested to enable an international team of collaborators to solve fundamental problems in interfacial glass corrosion chemistry...

Physical structures ranging in size from miniature objects (nanomaterials) to electrical devices (thin films) with planned properties can be made using the deposition and microfabrication capability. Materials with specific surface, bulk and interfacial properties for energy and environmental applications can be designed and made using these integrated capabilities. See a complete list of Deposition and Microfabrication instruments.

Resources and Techniques

  • Functionalized surfaces – Design and manufacture surfaces optimized for specific functions related to catalysis and other areas.
  • Model systems for geochemistry/biogeochemistry – Grow model oxide and mineral films with varying structure and complexity.
  • Materials with designed properties – Film growth and ion implantation for materials with specific properties.
  • Chemical and biological sensing – Film and surface layer deposition and modification, micro and nano-lithography, and solution synthesis capabilities.
  • Microfabrication – Engineering, software development and fabrication are used to design and fabricate next-generation components.

Ag Out-surface Diffusion In Crystalline SiC With An Effective SiO2 Diffusion Barrier.

Abstract: 

For applications of tristructural isotropic (TRISO) fuel particles in high temperature reactors, release of radioactive Ag isotope (110mAg) through the SiC coating layer is a safety concern. To understand the diffusion mechanism, Ag ion implantations near the surface and in the bulk were performed by utilizing different ion energies and energy-degrader foils. High temperature annealing was carried out on the as-irradiated samples to study the possible out-surface diffusion. Before and after annealing, Rutherford backscattering spectrometry (RBS) and secondary ion mass spectrometry (SIMS) measurements were employed to obtain the elemental profiles of the implanted samples. The results suggest little migration of buried Ag in the bulk, and an out-diffusion of the implanted Ag in the near-surface region of single crystal SiC. It is also found that a SiO2 layer, which was formed during annealing, may serve as an effective barrier to reduce or prevent Ag out diffusion through the SiC coating layer.

Citation: 
Xue H, HY Xiao, Z Zhu, V Shutthanandan, LL Snead, LA Boatner, WJ Weber, and Y Zhang.2015."Ag Out-surface Diffusion In Crystalline SiC With An Effective SiO2 Diffusion Barrier."Journal of Nuclear Materials 464:294-298. doi:10.1016/j.jnucmat.2015.05.001
Authors: 
Zhu Zihua
V Shutthanandan
Xue H
HY Xiao
Z Zhu
V Shutthanan
LL Snead
LA Boatner
WJ Weber
Y Zhang
Facility: 
Volume: 
Issue: 
Pages: 
Publication year: 
2015

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Leads

(509) 371-7816

Dr. Bowden joined EMSL in 2009 and currently manages EMSL's optical spectroscopy and diffraction, subsurface flow and transport, and microfabrication and deposition capabilities. He is responsible for the X-ray diffraction facility and assists...