Microscope: Helium Ion
- Small Beam Size: < 0.1 nm
- High Resolution: ≤ 0.35 nm
- Magnification: 100-1,000,000
- Field of View: 1 mm-100 nm
- Large Depth of Field: > 10 mm
- RBS Spatial Resolution: ~10 nm
- Base Pressure:
- 5.0x10-7 Torr (main chamber)
- 3.75x10-5 Torr (sample introduction load-lock chamber)
- No Conductive Coatings Necessary
- High Surface Sensitivity
- High Image Contrast
- Low-Z Imaging
- Backscattered Ion Imaging
- Manufacturer: Carl Zeiss SMT AG
EMSL's helium ion microscope is the first HIM to be offered at a national scientific user facility. It promises to advance biological, geochemical, biogeochemical, and surface/interface studies using its combined surface sensitivity and high-resolution microscopy functions. The HIM is equipped with a Rutherford Backscattering Spectrometry (RBS) capability that identifies atomic elements. In the future, the RBS capability will allow 3-D chemical analysis when paired with an improved spectrum detector.
Biological, geochemical, and biogeochemical samples — characterizing sample properties and behavior at nano and sub-atomic levels, including emerging novel materials with a range of scientific applications
Nanostructures of catalysts — understanding the relationship between the nature of nanostructure and chemical functionality
Energy — studying surface/interface characteristics to develop materials with novel functions, improved efficiency, and fewer pollutant byproducts
National security — developing ultrasensitive materials to detect and reduce biological and radioactive threats and chemical agents
Material modification — using sub-nanometer He+ ion beam to modify and tailor material properties
EMSL's HIM Offers:
Ultra-high resolution — reveals fine structure details and allows chemical visualization of nanostructures and biological samples, including those with low-Z elements
RBS — identifies atomic elements and determines material composition using a sub-nanometer He+ ion probe
Charge neutralization — uses an electron flood gun to neutralize charge for insulating samples based on line or frame scans
Small beam size — provides stable beam energy and current over a period of time using one of 24 selectable apertures measuring 5, 10, or 20 μm in diameter
Novel features — offers EMSL users an additional 4.5-inch center port and two 2.75-inch ports for other characterization capabilities.
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- RBS/C, HRTEM and HRXRD study of damage accumulation in irradiated SrTiO3.
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