Deposition and Microfabrication

Physical structures ranging in size from miniature objects (nanomaterials) to electrical devices (thin films) with planned properties can be made using the deposition and microfabrication capability. Materials with specific surface, bulk and interfacial properties for energy and environmental applications can be designed and made using these integrated capabilities. See a complete list of Deposition and Microfabrication instruments.

Resources and Techniques

  • Functionalized surfaces – Design and manufacture surfaces optimized for specific functions related to catalysis and other areas.
  • Model systems for geochemistry/biogeochemistry – Grow model oxide and mineral films with varying structure and complexity.
  • Materials with designed properties – Film growth and ion implantation for materials with specific properties.
  • Chemical and biological sensing – Film and surface layer deposition and modification, micro and nano-lithography, and solution synthesis capabilities.
  • Microfabrication – Engineering, software development and fabrication are used to design and fabricate next-generation components.

Description

Capability Details
• Unique oxygen-plasma-assisted molecular beam epitaxy system for designing and constructing high-quality oxide thin films
• Spin coating and wet chemical synthesis to prepare thin films and nanostructures
• Focused ion beam for nanolithography and deposition and manipulation of structures at the nano scale
• Microfabrication suite for designing and etching complex patterns into varied substrates
• Hybrid physical vapor deposition system for depositing thin films of metals, oxides, nitrides and alloys with high purity and thickness control
• Pulsed laser deposition for growing complex oxides films
• Low-energy ion deposition for preparing ultra-pure films of complex molecules, including biomolecules, through a mass-selected soft-landing process
• Diverse and unrivaled expertise in advanced signal acquisition and processing instrumentation, signal analysis algorithms, laboratory automation systems and scientific data management solutions

Instruments

More details about this instrument will be available soon.
Custodian(s): Hardeep S Mehta
More details available soon.
Custodian(s): Mark Bowden
This instrument is newly available to EMSL users. For more information about this instrument and the science it will help enable, see the ...
Custodian(s): Ryan Kelly
Only available at EMSL, the Discovery Deposition System has been customized to be a fully automated multi-functional "hybrid" instrument with...
Custodian(s): Ryan Kelly
PNNL’s custom-built ice nucleation chamber is available to EMSL users to study the ice nucleating properties of atmospheric particles or aerosols in...

Publications

The hierarchically porous nitrogen-doped carbon materials, derived from nitrogen-containing isoreticular metal-organic framework-3 (IRMOF-3) through...
The distribution and concentration of lithium in Li-ion battery cathodes at different stages of cycling is a pivotal factor in determining battery...
Polarization-induced weak ferromagnetism has been predicted a few years back in perovskite MTiO3 (M = Fe, Mn, Ni) [Fennie, Phys. Rev. Lett. 100,...
Thermoproteales populations (phylum Crenarchaeota) are abundant in high-25 temperature (>70° C) environments of Yellowstone National...
Polarization-induced weak ferromagnetism has been predicted a few years back in perovskite MTiO3 (M = Fe, Mn, Ni) [Fennie, Phys. Rev. Lett. 100,...

Science Highlights

Posted: January 25, 2017
Researchers at Pacific Northwest National Laboratory, EMSL and Argonne National Laboratory created a new material by modifying magnetite to capture...
Posted: July 25, 2016
Scientists have a limited understanding of how soot particles affect the complex ice-containing cirrus clouds, which are important to Earth's...
Posted: April 20, 2016
Molybdenum trioxide, or α-MoO3, has potential for use in lithium ion batteries and electrochromic devices, such as smart windows. A team of...
Posted: March 03, 2016
An international team of scientists demonstrated a new material by combining two oxide materials on the atomic scale that could store sunlight as...
Posted: February 01, 2016
The Science Microbial strains engineered to produce a large amount of lipids hold tremendous promise for the production of biofuels and chemicals. A...

Instruments

Quantum information science is an up and coming area of research aimed to transform computing capabilities in the future. The use of quantum bits, or...
The Nuclear Process Science Initiative (NPSI) is an internal, Laboratory Directed Research and Development (LDRD) program investment in support of...
Remediation of metal and radionuclide contaminants in soil and groundwater systems is challenging because of their strong chemical interactions with...
Nanomaterials represent an important class of materials with improved properties and fascinating applications. PNNL has been actively engaged in the...
We will develop new high-temperature sensor materials with adequate radiation damage resistance to acquire local diagnostic data in extreme...

Physical structures ranging in size from miniature objects (nanomaterials) to electrical devices (thin films) with planned properties can be made using the deposition and microfabrication capability. Materials with specific surface, bulk and interfacial properties for energy and environmental applications can be designed and made using these integrated capabilities. See a complete list of Deposition and Microfabrication instruments.

Resources and Techniques

  • Functionalized surfaces – Design and manufacture surfaces optimized for specific functions related to catalysis and other areas.
  • Model systems for geochemistry/biogeochemistry – Grow model oxide and mineral films with varying structure and complexity.
  • Materials with designed properties – Film growth and ion implantation for materials with specific properties.
  • Chemical and biological sensing – Film and surface layer deposition and modification, micro and nano-lithography, and solution synthesis capabilities.
  • Microfabrication – Engineering, software development and fabrication are used to design and fabricate next-generation components.

Pages

Leads

(509) 371-7816

Dr. Bowden manages EMSL's optical spectroscopy and diffraction, subsurface flow and transport, and microfabrication and deposition capabilities. He is responsible for the X-ray diffraction facility and assists or conducts measurement and...