Environmental Molecular Sciences Laboratory

A DOE Office of Science User Facility

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Deposition and Microfabrication

Physical structures ranging in size from miniature objects (nanomaterials) to electrical devices (thin films) with planned properties can be made using the deposition and microfabrication capability. Materials with specific surface, bulk and interfacial properties for energy and environmental applications can be designed and made using these integrated capabilities. See a complete list of Deposition and Microfabrication instruments.

Resources and Techniques

  • Functionalized surfaces – Design and manufacture surfaces optimized for specific functions related to catalysis and other areas.
  • Model systems for geochemistry/biogeochemistry – Grow model oxide and mineral films with varying structure and complexity.
  • Materials with designed properties – Film growth and ion implantation for materials with specific properties.
  • Chemical and biological sensing – Film and surface layer deposition and modification, micro and nano-lithography, and solution synthesis capabilities.
  • Microfabrication – Engineering, software development and fabrication are used to design and fabricate next-generation components.

Description

Capability Details
• Unique oxygen-plasma-assisted molecular beam epitaxy system for designing and constructing high-quality oxide thin films
• Spin coating and wet chemical synthesis to prepare thin films and nanostructures
• Focused ion beam for nanolithography and deposition and manipulation of structures at the nano scale
• Microfabrication suite for designing and etching complex patterns into varied substrates
• Hybrid physical vapor deposition system for depositing thin films of metals, oxides, nitrides and alloys with high purity and thickness control
• Pulsed laser deposition for growing complex oxides films
• Low-energy ion deposition for preparing ultra-pure films of complex molecules, including biomolecules, through a mass-selected soft-landing process
• Diverse and unrivaled expertise in advanced signal acquisition and processing instrumentation, signal analysis algorithms, laboratory automation systems and scientific data management solutions

Instruments

Systems Configuration and Operational Overview All work involving the following systems and any experiments conducted in EMSL laboratories must be...
Custodian(s): Tamas Varga, Mark Bowden
PNNL’s custom-built ice nucleation chamber is available to EMSL users to study the ice nucleating properties of atmospheric particles or aerosols in...
EMSL’s microfluidics and microfabrication suite includes the ability to design, fabricate, evaluate and model microfluidic devices and other...
Custodian(s): Ryan Kelly
EMSL's molecular beam epitaxy (MBE) deposition system is used for the synthesis and characterization of novel oxide, ceramic, and mineral materials...
Resembling Sputnik, the ozone- or oxygen-plasma-assisted molecular beam epitaxy system is designed to enable the growth of crystalline metal, alloy,...

Publications

Inside surfaces of polystyrene microfluidic structures were impregnated with the oxygen sensing dye (PtTFPP) using a solvent-induced fluorophore...
Current mass spectrometry (MS)-based proteomic approaches are ineffective for mapping protein expression in tissue sections with high spatial...
The expanding role of microfluidics for chemical and biochemical analysis is due to factors including the favorable scaling of separation performance...
Ferromagnetic Cr-doped rutile TiO2 single crystals were synthesized by high-temperature ion implantation. The associated structural, compositional...
We reexamine a well-established method for determining valence band maxima in semiconductors based on fitting photoemission spectra to theoretical...

Science Highlights

Posted: December 04, 2018
From Pacific Northwest National Laboratory's Physical Sciences Division Rechargeable lithium (Li) batteries are the most widely used energy storage...
Posted: October 16, 2018
From Pacific Northwest National Laboratory's Physical Sciences Division In the search for highly active and inexpensive electrocatalysts, two...
Posted: June 21, 2018
From Pacific Northwest National Laboratory's Physical Sciences Division In relationships and in materials, the rule that opposites attract applies....
Posted: April 13, 2018
From Pacific Northwest National Laboratory's Physical Sciences Division Controlling the formation of defects in materials is an important part of...
Posted: January 25, 2017
Researchers at Pacific Northwest National Laboratory, EMSL and Argonne National Laboratory created a new material by modifying magnetite to capture...

Instruments

The project aims to develop a high throughput and multiplex affinity purification mass spectrometry (AP-MS) assay by seamless integration of protein...
The proposed work will examine the interfacial phenomena of the organic ligand acetohydroxamic acid (aHa) at the hematite/water interface and the...
Complex oxides have the widest range of properties of any class of materials explored to date. However, with many degrees of freedom come many...
The proposed project aims to study the relation between nanoscale material structure and bulk performance metrics for a variety of energy materials...
The long-term goal of this project is to understand the growth of complex crystalline structures by aggregation and oriented attachment (OA) of...

Physical structures ranging in size from miniature objects (nanomaterials) to electrical devices (thin films) with planned properties can be made using the deposition and microfabrication capability. Materials with specific surface, bulk and interfacial properties for energy and environmental applications can be designed and made using these integrated capabilities. See a complete list of Deposition and Microfabrication instruments.

Resources and Techniques

  • Functionalized surfaces – Design and manufacture surfaces optimized for specific functions related to catalysis and other areas.
  • Model systems for geochemistry/biogeochemistry – Grow model oxide and mineral films with varying structure and complexity.
  • Materials with designed properties – Film growth and ion implantation for materials with specific properties.
  • Chemical and biological sensing – Film and surface layer deposition and modification, micro and nano-lithography, and solution synthesis capabilities.
  • Microfabrication – Engineering, software development and fabrication are used to design and fabricate next-generation components.

Pages

Leads

Dr. Bowden manages EMSL's optical spectroscopy and diffraction, subsurface flow and transport, and microfabrication and deposition capabilities. He is responsible for the X-ray diffraction facility and assists or conducts measurement and analysis...