Environmental Molecular Sciences Laboratory

A DOE Office of Science User Facility

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Deposition and Microfabrication

Physical structures ranging in size from miniature objects (nanomaterials) to electrical devices (thin films) with planned properties can be made using the deposition and microfabrication capability. Materials with specific surface, bulk and interfacial properties for energy and environmental applications can be designed and made using these integrated capabilities. See a complete list of Deposition and Microfabrication instruments.

Resources and Techniques

  • Functionalized surfaces – Design and manufacture surfaces optimized for specific functions related to catalysis and other areas.
  • Model systems for geochemistry/biogeochemistry – Grow model oxide and mineral films with varying structure and complexity.
  • Materials with designed properties – Film growth and ion implantation for materials with specific properties.
  • Chemical and biological sensing – Film and surface layer deposition and modification, micro and nano-lithography, and solution synthesis capabilities.
  • Microfabrication – Engineering, software development and fabrication are used to design and fabricate next-generation components.

Description

Capability Details
• Unique oxygen-plasma-assisted molecular beam epitaxy system for designing and constructing high-quality oxide thin films
• Spin coating and wet chemical synthesis to prepare thin films and nanostructures
• Focused ion beam for nanolithography and deposition and manipulation of structures at the nano scale
• Microfabrication suite for designing and etching complex patterns into varied substrates
• Hybrid physical vapor deposition system for depositing thin films of metals, oxides, nitrides and alloys with high purity and thickness control
• Pulsed laser deposition for growing complex oxides films
• Low-energy ion deposition for preparing ultra-pure films of complex molecules, including biomolecules, through a mass-selected soft-landing process
• Diverse and unrivaled expertise in advanced signal acquisition and processing instrumentation, signal analysis algorithms, laboratory automation systems and scientific data management solutions

Instruments

Systems Configuration and Operational Overview All work involving the following systems and any experiments conducted in EMSL laboratories must be...
Custodian(s): Tamas Varga, Mark Bowden
EMSL's molecular beam epitaxy (MBE) deposition system is used for the synthesis and characterization of novel oxide, ceramic, and mineral materials...

Publications

Abstract We address the issue of accurate determination of the energy at the top of the valence band for SrTiO3(001) single crystals, as well as TiO2...
We have used the relatively uninvestigated Zn(TMHD)2 precursor to grow highly c-axis oriented ZnO films on Si(100). X-ray photoelectron spectroscopy...
In the past decade, photoelectron emission microscopy (PEEM) has undergone major instrument development and become commercially available. PEEM...
As part of a search for new spintronic materials, highly ordered films of CrxTi1-xO2 in both rutile and anatase structure and for several Cr...
We reexamine a well-established method for determining valence band maxima in semiconductors based on fitting photoemission spectra to theoretical...

Science Highlights

Posted: December 04, 2018
From Pacific Northwest National Laboratory's Physical Sciences Division Rechargeable lithium (Li) batteries are the most widely used energy storage...
Posted: October 16, 2018
From Pacific Northwest National Laboratory's Physical Sciences Division In the search for highly active and inexpensive electrocatalysts, two...
Posted: June 21, 2018
From Pacific Northwest National Laboratory's Physical Sciences Division In relationships and in materials, the rule that opposites attract applies....
Posted: April 13, 2018
From Pacific Northwest National Laboratory's Physical Sciences Division Controlling the formation of defects in materials is an important part of...
Posted: January 25, 2017
Researchers at Pacific Northwest National Laboratory, EMSL and Argonne National Laboratory created a new material by modifying magnetite to capture...

Instruments

Solid phase processing (SPP) of alloys using shear-deformation results in nanoscale metastable phases and enhanced mechanical properties. High-speed...
The objective of this work is to elucidate atomic- to nano-scale mechanisms driving the evolution of materials in extreme environments, relevant to...

Physical structures ranging in size from miniature objects (nanomaterials) to electrical devices (thin films) with planned properties can be made using the deposition and microfabrication capability. Materials with specific surface, bulk and interfacial properties for energy and environmental applications can be designed and made using these integrated capabilities. See a complete list of Deposition and Microfabrication instruments.

Resources and Techniques

  • Functionalized surfaces – Design and manufacture surfaces optimized for specific functions related to catalysis and other areas.
  • Model systems for geochemistry/biogeochemistry – Grow model oxide and mineral films with varying structure and complexity.
  • Materials with designed properties – Film growth and ion implantation for materials with specific properties.
  • Chemical and biological sensing – Film and surface layer deposition and modification, micro and nano-lithography, and solution synthesis capabilities.
  • Microfabrication – Engineering, software development and fabrication are used to design and fabricate next-generation components.

Pages

Leads

Dr. Bowden manages EMSL's optical spectroscopy and diffraction, subsurface flow and transport, and microfabrication and deposition capabilities. He is responsible for the X-ray diffraction facility and assists or conducts measurement and analysis...