Allan Tuan

Pacific Northwest National Laboratory

Projects

Deposition of High-k Dielectric Thin Films

Lead Institution

University of Washington

Principal Investigator

Allan Tuan

Project type

Exploratory Research

Attempting to defvise a deposition scheme for high-k dielectric thin films on Si(100). Sugsequent characterization would ideally include TEM, XPS, SEM, and XRD.

Deposition and characterization of thin films for polarized UV light emission

Lead Institution

University of Washington

Principal Investigator

Allan Tuan

Project type

Exploratory Research

Deposit Mn doped ZnO epitaxial films by CVD in quantum well type structures for polarized UV light emission. Characterization would include XPS, XRD, SEM, SIMS, TEM, RBS, and other surface and thin…