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Deposition of low-temperature ITO on flexible polymer substrates


EMSL Project ID
1712

Abstract

Polymer/metal multilayers are being evaluated as oxygen/water barriers for encapsulting and packaging devices for Flat Panel Display (FPD). To test the performance of our barrier films in real situation,Indium-tin oxide films of high conductivity and high optical transmission need to be deposited on top of our barrier films. The deposition will be performance using the D.C. magnetron sputtering chamber in the EMSL Thin Film Deposition Lab.(1317). The process will be optimized to obtain the required electrical conductivity and optical transmission.

Project Details

Project type
Exploratory Research
Start Date
1999-10-20
End Date
2002-11-25
Status
Closed

Team

Principal Investigator

Pete Martin
Institution
Pacific Northwest National Laboratory