Series Connected Micro-Electro-Chemical Oxygen Sensor
EMSL Project ID
2250
Abstract
Micro fabrication and characterization of Series connected potentiometric oxygen sensor. The specific instruments required for this project will include pattern generator (5-10um resolution, mask alligner, thin film deposition capabilities such as sputtering, e-beam, wet/dry etching capabilities, surface profilers such as decktack etc. For details of the project please see the attached document
Project Details
Project type
Exploratory Research
Start Date
2001-06-19
End Date
2001-08-31
Status
Closed
Released Data Link
Team
Principal Investigator