Series Connected Micro-Electro-Chemical Oxygen Sensor
EMSL Project ID
2250
Abstract
Abstract
Micro fabrication and characterization of Series connected potentiometric oxygen sensor. The specific instruments required for this project will include pattern generator (5-10um resolution, mask alligner, thin film deposition capabilities such as sputtering, e-beam, wet/dry etching capabilities, surface profilers such as decktack etc. For details of the project please see the attached document
Project Details
Project type
Exploratory Research
Start Date
2001-06-19
End Date
2001-08-31
Status
Closed
Released Data Link
Team
Principal Investigator