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Maris Mantenieks

Institution
NASA Glenn Research Center

Projects

The Measurement of Low Energy Ion Sputtering Yields Utilizing RBS

Lead Institution
NASA Glenn Research Center
Principal Investigator
Maris Mantenieks
Project type
Exploratory Research
Sputtering, a process by which a target is removed by an impinging ion, has been studied in great detail since the early sixties. Despite this, the need exists for accurate sputtering yield…