Tonya Klein

University of Alabama

Projects

Thermogravimetric Mass Spectroscopic Analysis During Annealing of HfO2 Thin Films in Argon

Lead Institution

University of Alabama

Principal Investigator

Tonya Klein

Project type

Exploratory Research

HfO2 is a promising new gate dielectric material for CMOS devices. The dielectrics must be able to withstand 600 C or more after deposition during subsequent integrated circuit processing. Even…