Krys Wallace

Pacific Northwest National Laboratory

Projects

Addressing Challenges in Nanoscale Characterization

Lead Institution

Pacific Northwest National Laboratory

Principal Investigator

Daniel Gaspar

Project type

Large-Scale EMSL Research

Nanoscale materials offer the promise of significant advances in fields as diverse as the production, storage and efficient use of energy, sensing and environmental remediation. The characterization…

Characterization and method development for back-end of the line wafer processing concepts

Lead Institution

LAM Research Corporation

Principal Investigator

Diane Hymes

Project type

Exploratory Research

Advanced concepts in back end of the line (BEOL) wafer processing are necessary to push semiconductor technology beyond the 90-nm node. Characterization of chips in this regime and for these…