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Meeyoung Yoon

Institution
University of Washington

Projects

Deposition and characterization of high-k dielectric thin films

Lead Institution
University of Washington
Principal Investigator
Meeyoung Yoon
Project type
Exploratory Research
Processing and characterization of high-k dielectric thin films for ULSI applications. Dielectrics such as TiO2, Ta2O5, ZrO2 will be studied via insitu AES, XPS, LEED.