Yuji Kuan

Texas Instruments Incorporated

Projects

Stability of H species in various dielectric films used in advanced microelectronic fabrication

Lead Institution

Texas Instruments Incorporated

Principal Investigator

Yuji Kuan

Project type

Exploratory Research

High concentration of H is found to present in various CVD dielectric films used in the interconnect part of microelectronic fabrication processes, which may be present as Si-H, N-H, O-H and C-H…