Zhiyi Yu

Freescale Semiconductor Inc.

Projects

Surface and Interface Studies of MBE Grown Epi-Oxides on Oxide and Silicon Substrates

Lead Institution

Freescale Semiconductor Inc.

Principal Investigator

Zhiyi Yu

Project type

Exploratory Research

Investigation of oxygen diffusion in single crystal STO films grown on Si

Lead Institution

Freescale Semiconductor Inc.

Principal Investigator

Zhiyi Yu

Project type

Exploratory Research

Single crystal STO films that were grown on Si will be used in this study. We will use RBS/channeling, nuclear reaction analysis, high resolution TEM and XRD to charcaterize the samples.