Investigation of oxygen diffusion in single crystal STO films grown on Si
EMSL Project ID
1091a
Abstract
Single crystal STO films that were grown on Si will be used in this study. We will use RBS/channeling, nuclear reaction analysis, high resolution TEM and XRD to charcaterize the samples.
Project Details
Project type
Exploratory Research
Start Date
2003-02-07
End Date
2006-02-12
Status
Closed
Released Data Link
Team
Principal Investigator