SEM/EDS of Thin FIlms

This work supports the DOE-BES funded program on Thin FIlms managed by Greg Exarhos at PNNL. The objective of the work is to develop thin films with tailored optical and electrical properties. Recently, we have determined that SEM/EDS is necessary to characterize some of these films. We are interested in determining morphology of these films and the distribution of selected components.