Characterization of silicon carbide coating silicon wafer surface

This research looks into the possibility of coating the surface of silicon wafers with silicon carbide that is synthesized via the pyrolysis of polymethyl silane (PMS). The PMS is obtained by the polycondensation reaction of dichloromethyl silane (DMS) on the pretreated surface of silicon. There are potential applications of SiC coated silicon wafers to microelectronics.