Fabrication of Photomasks and Patterned Molds Using Photolithography
EMSL Project ID
1983
Abstract
Our research at Portland State University focuses on microfabrication and molecular recognition. We are frequent in need of micron-size molds in our research. Due to the lack of microfabrication facilities at the University, we therefore request the use of the Microfabrication Laboratory at PNNL. The goal of this project is to fabricate lithographic patterns of a photoresist on silicon wafers. The project will be conducted at the Microfabrication Laboratory at PNNL under the technical guidance of Dr. Glen Dunham.
Project Details
Project type
Exploratory Research
Start Date
2000-07-17
End Date
2000-11-01
Status
Closed
Released Data Link
Team
Principal Investigator
Team Members