Microelectrode array
EMSL Project ID
2121
Abstract
Objective 1: To fabricate an array of electrodes on a Si substrate. The process will require the deposition of oxide/nitride layers and metal deposition, etching, lithography.
Project Details
Project type
Exploratory Research
Start Date
2001-04-17
End Date
2002-03-31
Status
Closed
Released Data Link
Team
Principal Investigator