Fabrication of MIP Filaments
EMSL Project ID
2262
Abstract
I am currently working on a project for Dr. Yan of Portland State University. This project involves making molecularly imprinted polymers for use as optical detectors. In specific, I want to make filaments in 50 x 50 micron dimensions across a silicon wafer. To fabricate these filaments, I need to make masks of a specific pattern on emulsion plates and then employ photolithography to make a master pattern on silicon. I would like to use the equipment at PNNL for both of these processes. The silicon masters produced at PNNL will be used in conjunction with soft lithography throughout my Master’s research project at Portland State University. Below is my detailed plan of action at PNNL. First, I would like to use your instrumentation and emulsion plates to make three masks of specific and simple design. The first mask will contain 5 lines of 8 cm length by 50 micron width spaced out across the mask surface. The second mask will contain 5 lines of 8 cm length by 100 micron width spaced across the wafer surface. The third mask will contain a 50 micron line in the shape of a U. I will need some instruction on the specific usage of your instrumentation. If my proposal is approved, I will be coming to PNNL with Dr. Jody House of Oregon Graduate Institute who has experience using your instrumentation and has offered to teach me how to use it. Or I would love to learn from anyone available at your institute. I will be able to pay for the costs of producing the quartz masks.Second, I wish to use your photolithography equipment to make a silicon master. In specific, I would like to use a spin coater, hotplate or oven for soft and hard bake, and mask aligner to expose my photoresist. I understand the photolithography process and have all the specifications needed for my particular photoresist (SU-8). I will bring the necessary wafers, photoresist, and developing solutions.
Project Details
Project type
Exploratory Research
Start Date
2001-06-20
End Date
2002-06-30
Status
Closed
Released Data Link
Team
Principal Investigator