Skip to main content

Pressure Sensor


EMSL Project ID
44390

Abstract

We propose the development and fundamental demonstration of a MEMS pressure sensor technology that will operate in extreme pressures and temperatures. The initial performance target will be less than 4 mm3 with operation at temperatures of up to 500OC and 1 MPa of pressure. This demonstration will provide a prototype that will allow for enough data on a new technique for a major conference and journal publication focused on the development of specialized sensor networks for a variety of extreme environment applications like deep oils well sensing, rocket propulsion regulation, and combustion engine evaluation. The resources necessary to design and fabricate the sensor are currently available in the recently updated EMSL microfabrication facility.

Project Details

Project type
Exploratory Research
Start Date
2011-04-13
End Date
2012-04-15
Status
Closed

Team

Principal Investigator

Allan Evans
Institution
Pacific Northwest National Laboratory