Micro-dimension Calibration
EMSL Project ID
5122a
Abstract
Precision microfabraicated parts can not be calibrated even with best optical microscope. SEM (FESEM) can provide the depth of field for the ultimate micro-de=imension calibration.
Project Details
Project type
Exploratory Research
Start Date
2003-11-18
End Date
2004-11-22
Status
Closed
Released Data Link
Team
Principal Investigator