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Micro-dimension Calibration


EMSL Project ID
5122a

Abstract

Precision microfabraicated parts can not be calibrated even with best optical microscope. SEM (FESEM) can provide the depth of field for the ultimate micro-de=imension calibration.

Project Details

Project type
Exploratory Research
Start Date
2003-11-18
End Date
2004-11-22
Status
Closed

Team

Principal Investigator

Y Peng
Institution
XL Science & Technology