Chen-luen Shih

University of Washington

Projects

Low temperature Si device fabrication

Lead Institution

University of Washington

Principal Investigator

Scott Dunham

Project type

Exploratory Research

There is a demand for high performance semiconductor devices which are thin and flexible, for applications where high frequency operation, light weight, and conforming to a curved surface is…

METAL-INDUCED CRYSTALLIZATION VIA SPUTTERING DEPOSITION ON FLEXIBLE SUBSTRATES AND ITS APPLICATIONS

Lead Institution

University of Washington

Principal Investigator

Scott Dunham

Project type

Large-Scale EMSL Research

We propose to continue investigation of metal-induced crystallization (MIC) via sputter deposition. Poly-Si films were successfully grown on 0.5&#956;m thermal oxide on silicon wafers and…