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James (Bill) Rogers

Institution
Idaho National Laboratory

Projects

Deposition and characterization of high-k dielectric thin films

Lead Institution
University of Washington
Principal Investigator
Meeyoung Yoon
Project type
Exploratory Research
Processing and characterization of high-k dielectric thin films for ULSI applications. Dielectrics such as TiO2, Ta2O5, ZrO2 will be studied via insitu AES, XPS, LEED.

Molecular Beam Epitaxy Growth of Barium Strotium Titanate

Lead Institution
Idaho National Laboratory
Principal Investigator
James (Bill) Rogers
Project type
Exploratory Research
Use molecular beam epitaxy for the deposition of barium strontium titanate thin films. Deposition on Pt substrates will allow formation of capacitor structures for measurement of electrical…