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Molecular Beam Epitaxy Growth of Barium Strotium Titanate


EMSL Project ID
3102

Abstract

Use molecular beam epitaxy for the deposition of barium strontium titanate thin films. Deposition on Pt substrates will allow formation of capacitor structures for measurement of electrical properties, primarily dielectric permittivity and leakage current. Film thickness, structure, and stoichiometry will be varied to determine their effect on the electrical properties of the capacitors.

Project Details

Project type
Exploratory Research
Start Date
2002-11-11
End Date
2003-12-02
Status
Closed

Team

Principal Investigator

James (Bill) Rogers
Institution
Idaho National Laboratory

Team Members

Tiffany Kaspar
Institution
Pacific Northwest National Laboratory