Molecular Beam Epitaxy Growth of Barium Strotium Titanate
EMSL Project ID
3102
Abstract
Use molecular beam epitaxy for the deposition of barium strontium titanate thin films. Deposition on Pt substrates will allow formation of capacitor structures for measurement of electrical properties, primarily dielectric permittivity and leakage current. Film thickness, structure, and stoichiometry will be varied to determine their effect on the electrical properties of the capacitors.
Project Details
Project type
Exploratory Research
Start Date
2002-11-11
End Date
2003-12-02
Status
Closed
Released Data Link
Team
Principal Investigator
Team Members