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Larry Olsen

Institution
Pacific Northwest National Laboratory

Projects

Characterization of sputtered ZnO films

Lead Institution
Pacific Northwest National Laboratory
Principal Investigator
Larry Olsen
Project type
Exploratory Research
We are sputtering films of ZnO with a RF magnetron system, and wish to characterize the thickness uniformity and grain size. Mr. Dunham has suggested the use of an optical profilometer to…