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Suresh Baskaran

Institution
Pacific Northwest National Laboratory

Projects

Plasma Coating for Surface Passivation of Silica-coated Wafers

Lead Institution
Pacific Northwest National Laboratory
Principal Investigator
Suresh Baskaran
Project type
Exploratory Research
he surface of silica coating prepared by Sol-gel process contains large amount of adsorbed water molecules. The presence of these polar molecules adversely affect the properties of the Silica…

Preparation of Ultra Low Dielectric Constant Silica Films

Lead Institution
Pacific Northwest National Laboratory
Principal Investigator
Suresh Baskaran
Project type
Exploratory Research
Objective is to develop ultra low dielectric constant silica films for microelectronic device applications. Optimization of dielectric, chemical and mechanical properties will involve nanostructure…