Plasma Coating for Surface Passivation of Silica-coated Wafers
EMSL Project ID
1695
Abstract
he surface of silica coating prepared by Sol-gel process contains large amount of adsorbed water molecules. The presence of these polar molecules adversely affect the properties of the Silica coating for applications, for example, as low dielectrics in Semiconductor industry. In this work the effectiveness of plasma treatment will be evaluated for the removal of water molecules followed by a hydrophobic coating by Plasma CVD.
Project Details
Project type
Exploratory Research
Start Date
1999-09-29
End Date
2002-06-26
Status
Closed
Released Data Link
Team
Principal Investigator
Related Publications
Williford RE, XS Li, RS Addleman, GE Fryxell, S Baskaran, JC Birnbaum, CA Coyle, TS Zemanian, CM Wang, and AR Courtney. 2005. "Mechanical Stability of Templated Mesoporous Silica Thin Films." Microporous and Mesoporous Materials 85(3):260-266.