Deposition of High-k Dielectric Thin Films
EMSL Project ID
1771
Abstract
Attempting to defvise a deposition scheme for high-k dielectric thin films on Si(100). Sugsequent characterization would ideally include TEM, XPS, SEM, and XRD.
Project Details
Project type
Exploratory Research
Start Date
1999-12-27
End Date
2003-01-02
Status
Closed
Released Data Link
Team
Principal Investigator