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SEM imaging of microstructures


EMSL Project ID
2233

Abstract

Acquire images of microstructures fabricated by photolithographic techniques.

Project Details

Project type
Exploratory Research
Start Date
2001-05-17
End Date
2001-12-31
Status
Closed

Team

Principal Investigator

Lawrence Bowman
Institution
University of Alaska Fairbanks

Team Members

Glen Dunham
Institution
Pacific Northwest National Laboratory