Characterization of Nb Films
EMSL Project ID
49073
Abstract
3-D chemical imaging of HP supplied Nb oxide and Nb nitride thin films. These films will be prepared using the EMSL FEI Helios Nanolab dual-beam focused ion beam/scanning electron microscopy (FIB/SEM) microscope to fabricate appropriate atom-probe tip samples for APT analysis. The atom probe measurements will assist HP in the microstructural characterization with the goal to obtain oxygen morphology in the HP supplied films.
Project Details
Start Date
2016-02-22
End Date
2016-09-20
Status
Closed
Released Data Link
Team
Principal Investigator
Team Members