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Characterization of Nb Films


EMSL Project ID
49073

Abstract

3-D chemical imaging of HP supplied Nb oxide and Nb nitride thin films. These films will be prepared using the EMSL FEI Helios Nanolab dual-beam focused ion beam/scanning electron microscopy (FIB/SEM) microscope to fabricate appropriate atom-probe tip samples for APT analysis. The atom probe measurements will assist HP in the microstructural characterization with the goal to obtain oxygen morphology in the HP supplied films.

Project Details

Start Date
2016-02-22
End Date
2016-09-20
Status
Closed

Team

Principal Investigator

Douglas Ohlberg
Institution
Hewlett-Packard Company

Team Members

Arun Devaraj
Institution
Pacific Northwest National Laboratory

Daniel Perea
Institution
Environmental Molecular Sciences Laboratory

William Stickle
Institution
Hewlett-Packard Company

Mark Engelhard
Institution
Environmental Molecular Sciences Laboratory