MBE growth of epitaxial anatase TiO2 (001) on STO(001) on Si(001) and characterization of TiO2 films
EMSL Project ID
5097
Abstract
The proposed visit to the EMSL facilities at PNNL is for the observation of the oxygen plasma assisted molecular beam epitaxy (OPA-MBE) deposition process of epitaxially grown anatase TiO2 on SrTiO3(STO) on Si. In addition, use of some structural characterization instruments, Rutherford backscattering spectroscopy (RBS) and x-ray photoemission spectroscopy (XPS) to obtain crystalline structure and chemical state measurements, in the Interfacial and Nanoscale Science Facility for already grown TiO2 films is desired. My research on the growth and characterization of anatase TiO2/STO/Si is part of a larger NSF-funded joint project on Varied Synthetic Approaches to the Development of Room-Temperature Ferromagnetic and Semiconducting Oxide Nanostructures for Silicon-Based Spintronics, between PNNL and the materials science and engineering, chemistry, and physics departments at the University of Washington. Observation of the MBE deposition process is of interest for familiarization of the growth process of highly crystalline epitaxial TiO2 films on STO on Si. Deposition of STO(001) onto Si(001) is a time-intensive, detailed process and is primarily carried out in three steps at PNNL involving an HF etch of substrates, a UHV anneal, and closely monitored layer by layer growth. The anatase TiO2 (001) is then deposited by OPA-MBE at a relatively slow deposition rate of less than 0.1 nm/s. At UW, I am growing TiO2 films by sputter deposition, where the interest in a sputter process arises from the desire for large scale synthesis of these films for device applications. Collaboration and communication between the groups studying MBE grown films and the sputter deposited films are necessary for optimization of the anatase TiO2 onto a STO/Si system for spintronic device applications.
Project Details
Project type
Exploratory Research
Start Date
2003-10-15
End Date
2005-11-01
Status
Closed
Released Data Link
Team
Principal Investigator
Team Members
Related Publications
1. Honeker, L. K.; Hildebrand, G. A.; Fudyma, J. D.; Daber, L. E.; Hoyt, D.; Flowers, S. E.; Gil-Loaiza, J.; Kübert, A.; Bamberger, I.; Anderton, C. R.; Cliff, J.; Leichty, S.; AminiTabrizi, R.; Kreuzwieser, J.; Shi, L.; Bai, X.; Velickovic, D.; Dippold, M. A.; Ladd, S. N.; Werner, C.; Meredith, L. K.; Tfaily, M. M. Elucidating Drought-Tolerance Mechanisms in Plant Roots through (1) H NMR Metabolomics in Parallel with MALDI-MS, and NanoSIMS Imaging Techniques. Environ Sci Technol 2022