Post Growth Analysis of compositionally graded InGaN Grown with MOCVD
EMSL Project ID
19091
Abstract
Under the seed funding recently obtained from Semiconductor Research Corporation (Research Triangle, NC), we are investigating nitride-based quantum well structures for the development of direct-chip-cooling
devices. Putting together two fundamental concepts, thermionic cooling and laser cooling, we proposed an
entirely different and novel approach to heat pumping, "Thermionic-Opto-Refrigeration (TOR)". The big
plus of this concept is that TOR gets the heat out of the system through emission of light. This is radically
different from conventional solid-state cooling where the heat must be taken away from the system through
either conduction or convection. TOR utilizes inherent electronic process involved in high temperatures,
coupled with a forced quenching process in a quantum well, thus this concept is immediately applicable for
microchip-cooling. We are utilizing Metal-Organic-Chemical-Vapor-Deposition (MOCVD) technique to
fabricate a GaN/InGaN/GaN quantum well structure.
The objective of this proposal is to characterize the GaN/InGaN/GaN thin film structures using various
analytical tools available in the Environmental Molecular Science Laboratories (EMSL) at the Pacific
Northwest National Laboratories (PNNL). Characterization techniques include high resolution x-ray
diffraction (XRD) and transmission electron microscopy (TEM) for structural and crystallography analysis,
Auger electron spectroscopy (AES) for chemical compositions and depth profile, X-ray photoelectron
spectroscopy (XPS) for chemical and compositional information, Rutherford Back Scattering (RBS) for
compositional and interface structural analysis using ion channeling technique, secondary ion mass
spectroscopy (SIMS) for identification of dopants in the film structure, and other optical and electron
spectroscopy techniques as needed.
Project Details
Project type
Large-Scale EMSL Research
Start Date
2006-07-28
End Date
2007-08-30
Status
Closed
Released Data Link
Team
Principal Investigator
Team Members